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- 2021 Optical Design Method for Wide-Field Imaging Objective Made of Reflective Multilayer Mirrors for Extreme Ultraviolet Microscopy 相澤 駿介, 脇 俊太郎, 豊田 光紀 3032-06 東京工芸大学工学部紀要 44-1 01 ENG
- 2021 Conservation of energy between pupil and image for point spread function Masato Shibuya, Takao Tanabe, Mitsunori Toyoda 2021-10 Optik 249 168189 ENG
- 2017 Imaging Properties of an Extreme Ultraviolet Microscope Objective with Reduced Fresnel Number M. Toyoda, K. Kuramitsu, M. Yanagihara 2017-09 Opt. Commun. 405 (2017) 312-317. ENG
- 2017 Low-Order Aberrations Correction of Extreme Ultraviolet Imaging Objective with Deformable Multilayer Mirrors M. Toyoda, R. Sunayama, M. Yanagihara 2017-06 Proceedings of the 9th Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation ENG
- 2017 Point Diffraction Interferometer for Inspection of High-Magnification Objective for Extreme Ultraviolet Microscopy M. Toyoda, R. Sunayama, M. Yanagihara. 2017-06 The 61st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (Orlando, USA) ENG
- 2016 Design, fabrication, and test of extreme ultraviolet microscope with 30-nm spatial resolution 2016-11 Physics of X-Ray and Neutron Multilayer Structures Workshop 2016 (Enschede, Netherlands) ENG
- 2016 Low-order aberration correction of extreme ultraviolet imaging objective with deformable multilayer mirrors M. Toyoda, R. Sunayama, M. Yanagihara. 2016-09 9th edition of the MEDSI conference (Barcelona, Spain) ENG
- 2016 Multilayer Mirror Objective for Focusing Isolated Attosecond Pulse in 40 nm Wavelength Region M. Toyoda, Y. Tamaru, S. Mori, K. Sawada, Y. Fu, E. J. Takahashi, A. Suda, F. Kannari, K. Midorikawa, M. Yanagihara 2016-05 The 15th International Conference on X-Ray Lasers (Nara, Japan) ENG
- 2015 Flat-Field Anastigmatic Mirror Objective for High-Magnification Extreme Ultraviolet Microscopy 2015-06 Adv. Opt. Techn. 4 (2015) 339–346 ENG
- 2014 Demonstrating 30-nm Spatial Resolution of Three-Multilayer-Mirror Objective for Extreme Ultraviolet Microscopy: Imaging Test by Observing Lithography Mask M. Toyoda, K. Yamasoe, A. Tokimasa, K. Uchida, T. Harada, T. Terasawa, T. Amano, T. Watanabe, M. Yanagihara, H. Kinoshita 2014-09 Appl. Phys. Express 7 (2014) 102502 ENG
- 2014 Observation of Phase Defect on Extreme Ultraviolet Mask Using an Extreme Ultraviolet Microscope T. Amano, T. Terasawa, H. Watanabe, M. Toyoda, T. Harada, T. Watanabe, H. Kinoshita) 2014-06 J. Micro/Nanolith. MEMS MOEMS 13 (2014) 023012 ENG
- 2013 Observation of Phase Defect on Extreme Ultraviolet Mask Using an Extreme Ultraviolet Microscope T. Amano, T. Terasawa, H. Watanabe, M. Toyoda, T. Harada, T. Watanabe, H. Kinosihta 2014-02 Proc. SPIE 9048 (2014) 904827 ENG
- 2013 Design, fabrication, and test of a novel wide field microscope objective for extreme ultraviolet multiscale imaging. 2013-11 The 12th Symposium on X-ray Imaging Optics (Osaka, Japan) ENG
- 2013 Extreme Ultraviolet Mask Defect Observation Using an Extreme Ultraviolet Microscope T. Amano, T. Terasawa, H. Watanabe, M. Toyoda, T. Harada, T. Watanabe, H. Kinoshita 2013-09 Proc. SPIE 8880 (2013) 888021 ENG
- 2013 Simulation Analysis of the Characteristics of a High Magnification Imaging Optics for the Observation of Extreme Ultraviolet Lithography Mask to Predict Phase Defect Printability T. Terasawa, Y. Arisawa, T. Amano, T. Yamane, H. Watanabe, M. Toyoda, T. Harada, H. Kinoshita 2013-08 Jpn. J.Appl .Phys. 52(2013) 096601 ENG
- 2013 Observation of Residual-Type Thin Absorber Defect on Extreme Ultraviolet Lithography Mask Using an Extreme Ultraviolet Microscope T. Amano, S. Iida, R. Hirano, T. Terasawa, H. Watanabe, K. Yamasoe, M. Toyoda, A. Tokimasa, T. Harada, T. Watanabe, H. Kinoshita) 2013-04 Appl. Phys. Express 6 (2013) 046501 ENG
- 2012 Design, fabrication, and test of an EUV mask imaging microscope for lithography generations with sub-16 nm half pitch M. Toyoda, K. Yamasoe, M. Yanagihara, T. Amano, T. Terasawa, A. Tokimasa,T.Harada, T. Watanabe, H. Kinoshita 2013-01 2013 International Symposium on Extreme Ultraviolet Lithography (Toyama, Japan) ENG
- 2012 At-Wavelength Extreme Ultraviolet Lithography Mask Observation Using a High-Magnification Objective with Three Multilayer Mirrors M. Toyoda, K. Yamasoe, T. Hatano, M. Yanagihara, A. Tokimasa, T. Harada, T. Watanabe, H. Kinoshit 2012-10 Appl. Phys. Express 5(2012) 112501. ENG
- 2012 At-Wavelength Observation of EUV Lithography Mask Using a High-Magnification Objective with Three Multilayer Mirrors 2012-09 2012 International Symposium on Extream Ultraviolet Lithography, (Brussels, Belgium) ENG
- 2012 At-Wavelength EUV Lithography Mask Observation Using a High-Magnification Objective with Three Multilayer Mirrors M. Toyoda, K. Yamasoe, T. Hatano, M. Yanagihara, A. Tokimasa, T. Harada, T. Watanabe, H. Kinoshita 2012-05 The 56th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (Hawaii, USA) ENG
- 2011 An EUV Mask-imaging Microscope for Lithography Generations with sub-16 nm Half Pitch M. Toyoda, K. Yamasoe, K. Uchida, M. Yanagihara, A. Tokimasa, T. Harada, H. Kinoshita, T. Amano, T. Terasawa) 2012-01 25th International Microprocesses and Nanotechnology Conference (Kobe, Japan) ENG
- 2011 Closed-Form Representations for Third-Order Aberrations of Two-Aspherical Mirror Aplanats with the Mirror Tilt and Decenter 2011-11 Opt. Rev., 18 (2011) 441-447 ENG
- 2011 Closed-Form Representations for Third-Order Aberrations of Two-Aspherical Mirror Aplanats with the MirrorTilt and Decente M. Toyoda 2011-11 ENG
- 2011 Aplanatic Three‐Mirror Objective for High‐Magnification Soft X‐Ray Microscopy M. Toyoda, T. Jinno, M. Yanagihara 2011-09 AIP Conf. Proc 1365 (2011) 176-179. ENG
- 2010 "Super‐Hierarchical" Microscope in EUV Region T. Ejima, M. Toyoda, T. Tsuru, T. Hatano, M. Yanagihara 2010-08 The 10th international conference on x-ray microscopy (Chicago, USA) ENG
- 2010 Development of Wide Field of View EUV Microscope Using Normal Incident Multilayer Optics with LPP Light Source F. Ishida, T. Ejima, M. Toyoda, T. Tsuru, T. Hatano, M. Yanagihara, H. Mizutani 2010-08 he 10th international conference on x-ray microscopy (Chicago, USA) ENG
- 2010 Novel multilayer-mirror optics for a whole tissue imaging M. Toyoda, T. Jinno, T. Harada, T. Hatano, M. Yanagihara 2010-08 The 10th international conference on x-ray microscopy (Chicago, USA) ENG
- 2010 Theoretical Investigation of the Meaning of Odd-Order Aspherical Surface and Numerical Confirmation of Effectiveness in Rotational-Symmetric but Off-Axis Optics M. Shibuya, K. Maehara, Y. Ishikawa, A. Takada, K. Kobayashi, M. Toyoda, M. Tanikawa, S. Nakadate 2010-07 Opt. Eng. 49(2010) 073003 ENG
- 2010 Frustration of Direct Photoionizations of Rare Gas Clusters in Intense Extreme Ultraviolet Free-Electron Laser Pulses H. Iwayama, K. Nagaya, H. Murakami, M. Yao, H. Fukuzawa, X.J. Liu, G. Prümper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M.Yamamoto, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Dörner, M. Nagasono, 2010-04 J. Phys. Conf. Ser. 212 (2010) 012014 ENG
- 2009 High Throughput and Wide Field of View EUV Microscope for Blur-Free One-Shot Imaging of Living Organisms T. Ejima, F. Ishida, H. Murata, M. Toyoda, T. Harada, T. Tsuru, T. Hatano, M. Yanagihara, M. Yamamoto, H. Mizutani 2010-03 Opt. Express 18 (2010) 7203-7209. ENG
- 2009 High Throughput and Wide Field of View EUV Microscope for Blur-Free One-Shot Imaging of Living Organisms (T. Ejima, F. Ishida, H. Murata, M. Toyoda, T. Harada, T. Tsuru, T. Hatano, M. Yanagihara, M. Yamamoto, H. Mizutani) 2010-03 The virtual Journal for Biomedical Optics, (2010). 5 ENG
- 2009 Counting statistics in EUV-FEL shot-by-shot measurement for Ar cluster X.-J. Liu, G. Pruemper, H. Fukuzawa, K. Motomura, L. Foucar, M. Okunishi, K. Shimada, K. Ueda, H. Iwayama, K. Nagaya, M. Yao, N. Saito, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, A. Rudenko, J. Ullrich, A. Czasch, H. Schmidt-Boecking, R. Doerner, M 2009-12 International Workshop on Electronic Spectroscopy for Gas-phase molecules and Solid Surfaces (Matsushima, Japan) ENG
- 2009 Momentum Spectroscopy of Fragment Ions Emitted from Xe Clusters Irradiated by EUV-FEL at Spring-8 H. Fukuzawa, X.J. Liu, K. Motomura, G. Prümper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, K. Nagaya, H. Iwayama, M. Yao, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Dörner, M. Nagasono, A. Higashiya 2009-12 J. Phys. Conf. Ser 194(2009) 012052 ENG
- 2009 Multiple ionizations of rare-gas clusters by extreme ultraviolet free-electron laser at SPring-8 H. Fukuzawa, K. Motomura, X.-J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, H. Iwayama, K. Nagaya, M. Yao, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higash 2009-12 International Workshop on Electronic Spectroscopy for Gas-phase molecules and Solid Surfaces (Matsushima, Japan) ENG
- 2009 Design Study of Two-Aspherical-Mirror Anastigmat with Reduced Sensitivities to Misalignments: Correction of Higher-Order Aberrations M. Toyoda, M. Yanagihara 2009-09 J. Phys. Conf. Ser., 186 (2009) 012076 ENG
- 2009 Frustration of direct photoionizations of Argon cllusters irradiated with intense EUV-FEL pulses H. Iwayama, K. Nagaya, M. Yao, H. Fukuzawa, X.J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higashi 2009-07 XXVI International Conference on Photonic Electronic and Atomic Collisions (Kalamazoo, USA) ENG
- 2009 Frustration of Direct Photoionization of Ar Clusters in Intense Extreme Ultraviolet Pulses from a Free Electron Laser H. Iwayama, K. Nagaya, M. Yao, H. Fukuzawa, X.J. Liu, G. Prümper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Dörner, M. Nagasono, A. Higashiya 2009-06 J. Phys. B 42(2009) 134019 ENG
- 2009 Multi-Coincidence Ion Detection System for EUV–FEL Fragmentation Experiments at Spring-8 K. Motomura, L. Foucar, A. Czasch, N. Saito, O. Jagutzki, H. Schmidt-Böcking, R. Dörner, X.J. Liu, H. Fukuzawa, G. Prümper, K. Ueda, M. Okunishi, K. Shimada, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, H. Iwayama, K. Nagaya, M. Yao, A. Rudenko, J. U 2009-05 Nucl. Instrum. Methods. Phys. Res. A, 606(2009) 770-773 ENG
- 2009 Dead-Time-Free Ion Momentum Spectroscopy of Multiple Ionization of Xe Clusters Irradiated by EUV Free-Electron Laser Pulses (H. Fukuzawa, X.J. Liu, G. Prümper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, H. Iwayama, K. Nagaya, M. Yao, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Dörner, M. Nagasono, A. Higashiy 2009-03 Phys. Rev. (2009) A, 79 031201. ENG
- 2008 Dead-Time-Free Ion Momentum Spectroscopy of Multiple Ionization of Xe Clusters Irradiated by EUV Free-Electron Laser Pulses H. Fukuzawa, X.J. Liu, G. Prümper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, H. Iwayama, K. Nagaya, M. Yao, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Dörner, M. Nagasono, A. Higashiya 2009-03 Phys. Rev. A, 79 (2009) 031201 ENG
- 2008 Cluster size dependence of the multiphoton absorption of argon clusters in intense EUV-FEL pulses H. Iwayama, K. Nagaya, M. Yao, H. Fukuzawa, X. J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higash 2008-09 11th International Conference on Multiphoton Processes (Heidelberg, Germany) ENG
- 2008 Cluster size dependence of the multiple ionization of Ar clusters irradiated by intense EUV pulses from free electron laser H. Iwayama, K. Nagaya, M. Yao, H. Fukuzawa, X.-J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higash 2008-09 XIV International Symposium on Small Particles and Inorganic Clusters (Valladolid, Spain) ENG
- 2008 Interaction of intense EUV femtosecond laser pulses from free electron laser with rare gas clusters K. Nagaya, H. Iwayama, M. Yao, H. Fukuzawa, X. J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higash 2008-09 11th International Conference on Multiphoton Processes (Heidelberg, Germany) ENG
- 2008 Laser power dependence of the multiple ionization of Xe clusters irradiated by intense EUV pulses from free electron laser H. Fukuzawa, X.-J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, H. Iwayama, K. Nagaya, M. Yao, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higash 2008-09 XIV International Symposium on Small Particles and Inorganic Clusters (Valladolid, Spain) ENG
- 2008 Multiple ionization of rare gas clusters using the EUV-FEL at SPring-8 G. Pruemper, H. Fukuzawa, X.J. Liu, M. Okunishi, K. Shimada, K. Ueda,T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, N. Saito, K. Motomura, H. Iwayama, K. Nagaya, M. Yao, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higashiy 2008-09 11th International Coference on Multiphoton Processes (Heidelberg, Germany) ENG
- 2008 Multiple photoionization of rare gas clusters in intense EUV femtosecond laser pulse from free electron laser K. Nagaya, H. Iwayama, M. Yao, H. Fukuzawa, X.-J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higash 2008-09 XIV International Symposium on Small Particles and Inorganic Clusters (Valladolid, Spain) ENG
- 2008 Power dependence of the multiple ionization of xenon clusters irradiated by EUV-FEL pulses H. Fukuzawa, X. J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, H. Iwayama, K. Nagaya, M. Yao, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higash 2008-09 11th International Conference on Multiphoton Processes (Heidelberg, Germany) ENG
- 2008 Analytical Designing of Two-Aspherical-Mirror Optics for Soft X-Ray Imaging M. Toyoda, M. Yamamoto, M. Yanagihara) 2008-07 9th International Conference on X-Ray Microscopy (Zurich, Switzerland) ENG
- 2008 Exact Period Thickness Control of Soft X-ray Multilayers on Curved Substrates T. Harada, T. Jinno, M. Toyoda, T. Hatano, M. Yamamoto 2008-07 9th International Conference on X-Ray Microscopy (Zurich, Switzerland) ENG
- 2007 High throughput EUV Microscope TXM3 for single shot imaging T. Ejima, H. Murata, Y. Nakamura, M. Toyoda, T. Harada, M. Furudate, A. Arai, E. Sasaki, S. Yanagida, T. Tsuru, T. Hatano, M. Yanagihara, M. Yamamoto) 2008-02 The 9th International Conference on the Physics of X-Ray Multilayer Structures (Montana, USA) ENG
- 2007 High throughput EUV Microscope TXM3 for single shot imaging T. Ejima, H. Murata, Y. Nakamura, M. Toyoda, T. Harada, M. Furudate, A. Arai, E. Sasaki, S. Yanagida, T. Tsuru, T. Hatano, M. Yanagihara, M. Yamamoto 2008-02 The 9th International Conference on the Physics of X-Ray Multilayer Structures (Montana, USA) ENG
- 2007 Design of Aspherical Imaging Optics ToleratingPractical Misalignments for Soft-X-Ray Microscopes M. Toyoda, M. Yamamoto, M. Yanagihara 2007-07 15th International Conference on Vacuum Ultraviolet Radiation Physics (Berlin, Germany) ENG
- 2007 Development of Transmission-type X-ray Multilayer Mirror Microscope using LPP source T. Ejima, H. Murata, M. Toyoda, M. Yanagihara 2007-07 15th International Conference on Vacuum Ultraviolet Radiation Physics (Berlin, Germany) ENG
- 2007 X-Ray Magnetic Circular Dichroism Studies for Fe/Si Interfaces Using Standing Waves K. Sato, M. Sugawara, T. Jinno, M. Toyoda, T. Hatano, A. Arai, M. Yanagihara 2007-07 J. Phys. Conf. Ser., 83 (2007) 012012. ENG
- 2007 X-ray MCD studies for Fe/Si interfaces using standing waves M. Yanagihara, K. Sato, T. Jinno, M. Toyoda, T. Hatano, A. Arai 2007-07 15th International Conference on Vacuum Ultraviolet Radiation Physics (Berlin, Germany) ENG
- 2006 Fe L2,3 MCD Spectra from Fe/Si Multilayers M. Sugawara, K. Sato, T. Hatano, M. Toyoda, M. Yanagihara 2006-12 Photon Factory Activity Report 2005 Part B #23 125 ENG
- 2006 Soft X-Ray MCD Studies on Interfaces in Fe/Si Multilayers M. Sugawara, K. Sato, T. Hatano, M. Toyoda, M. Yanagihara 2006-07 KEK Proceedings 2006-3 (2006) 348-352 ENG
- 2006 Analytical Designing of Two-Aspherical-Mirror Anastigmats Permitting Practical Misalignments in a Soft-X-Ray Optics M. Toyoda, M. Yamamoto 2006-05 Opt. Rev., 13 (2006) 149-157 ENG
- 2005 Analytical Designing of Two-Aspherical-Mirror Anastigmat Permitting Practical Misalignments for Soft-X-Ray Imaging M. Toyoda, M. Yamamoto, M. Yanagihara 2005-07 IPAP Conf. Ser. 7 (2005) 186-188 ENG
- 2005 Schwarzschild Microscope in Vacuum Ultraviolet and Soft X-Ray Regions M. Watanabe, M. Yanagihara, T. Ejima, M. Toyoda, Y. Kondo, T. Hatano, T. Tsuru, M. Yamamoto) 2005-06 Nuclear Science and Techniques 16(2005) 129-138. ENG
- 2004 Development of Soft X-ray Wavefront Control Technology for Imaging Multilayer Mirrors M. Yamamoto, T. Hatano, T. Tsuru, M. Furudate, T.Harada, T. Ohigashi, M. Toyoda, T. Ejima, M. Yanagihara 2005-02 2nd International Symposium on Technologies and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources (Tsukuba, Japan) ENG
- 2000 Tracking of Individual Nanocrystals Using Diffracted X Rays Y.C. Sasaki, Y. Suzuki, N. Yagi, S. Adachi, M. Ishibashi, H. Suda, M. Toyoda, M. Yanagihara 2000-09 Phys. Rev. E 62 (2000) 3843-3847 ENG
- 2000 A Soft-X-Ray Imaging Microscope with a Multilayer-Coated Schwarzschild Objective: Imaging Tests M. Toyoda, Y. Shitani, M. Yanagihara, T. Ejima, M. Yamamoto, M. Watanabe 2000-04 Jpn. J. Appl. Phys. Pt. 1, 39 1926-1929 ENG
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