Academic Theses

Basic information

Name TOYODA Mitsunori

Title

Observation of Residual-Type Thin Absorber Defect on Extreme Ultraviolet Lithography Mask Using an Extreme Ultraviolet Microscope

Summary

 

ENG

ENG

ENG

T. Amano, S. Iida, R. Hirano, T. Terasawa, H. Watanabe, K. Yamasoe, M. Toyoda, A. Tokimasa, T. Harada, T. Watanabe, H. Kinoshita)

Date of Issue

2013-04

Magazine(name)

Appl. Phys. Express

Volume

6 (2013)

Page

046501

ENG

 

ENG

2013

ENG