Academic Theses
Title
Summary
ENG
ENG
ENG
Date of Issue
Magazine(name)
Volume
Page
ENG
ENG
ENG
Basic information
Name
TOYODA Mitsunori
Title
Observation of Residual-Type Thin Absorber Defect on Extreme Ultraviolet Lithography Mask Using an Extreme Ultraviolet Microscope
Summary
 
ENG
ENG
ENG
ENG
T. Amano, S. Iida, R. Hirano, T. Terasawa, H. Watanabe, K. Yamasoe, M. Toyoda, A. Tokimasa, T. Harada, T. Watanabe, H. Kinoshita)
Date of Issue
2013-04
Magazine(name)
Appl. Phys. Express
Volume
6 (2013)
Page
046501
ENG
 
ENG
2013
ENG