Academic Theses

Basic information

Name TOYODA Mitsunori

Title

Optical Design Method for Wide-Field Imaging Objective Made of Reflective Multilayer Mirrors for Extreme Ultraviolet Microscopy

Summary

The optical design of multilayer mirrors for imaging applications in extreme ultraviolet region is discussed.
Firstly, the conditions of the Bragg reflection required for a multilayer coating, in the case of imaging an on-axis object with a concave mirror

ENG

ENG

ENG

相澤 駿介, 脇 俊太郎, 豊田 光紀

Date of Issue

3032-06

Magazine(name)

東京工芸大学工学部紀要

Volume

44-1

Page

01

ENG

03876055

ENG

2021

ENG