2006-07

ENG

Deposition of Luminescent a-SiNx:H Films with SiH4 - N2 Gas Mixture by VHF-PECVD Using Novel Impedance Matching Method

International Conference on Optical and Optoelectronic Properties of Materials and Applications

S. Kobayashi、 N. Ohrui、 Y.C. Chao、 T. Aoki、 H. Kobayashi and T. Asakawa.

Darwin、 Australia

2006