Academic Theses
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Reactive sputter deposition of WO3 films by using two deposition methods
ENG
Y. Yasuda, Y. Hoshi, S. Kobayashi, T. Uchida, Y. Sawada, M. Wang, and H. Lei
2019-05
J. Vacuum Science & Technology A
Vol. 37
031514
10.1116/1.5092863
2019
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