学術論文
|
|
Reactive sputter deposition of WO3 films by using two deposition methods
学術論文
Y. Yasuda, Y. Hoshi, S. Kobayashi, T. Uchida, Y. Sawada, M. Wang, and H. Lei
2019/05
J. Vacuum Science & Technology A
Vol. 37
031514
10.1116/1.5092863
2019
|
