Academic Theses
Title
Summary
ENG
ENG
ENG
Date of Issue
Magazine(name)
Volume
Page
ENG
ENG
ENG
Basic information
Name
KOBAYASHI Shin-ichi
Title
IR Spectroscopic Study of Silicon Nitride Films Grown at a Low Substrate Temperature Using Very High Frequency Plasma-Enhanced Chemical Vapor Deposition
Summary
ENG
ENG
ENG
ENG
Date of Issue
2016-11
Magazine(name)
World Journal of Condensed Matter Physics
Volume
Vol6, No.4
Page
287-293
ENG
10.4236/wjcmp.2016.64027
ENG
2016
ENG