Academic Theses

Basic information

Name KOBAYASHI Shin-ichi

Title

IR Spectroscopic Study of Silicon Nitride Films Grown at a Low Substrate Temperature Using Very High Frequency Plasma-Enhanced Chemical Vapor Deposition

Summary

 

ENG

ENG

ENG

 

Date of Issue

2016-11

Magazine(name)

World Journal of Condensed Matter Physics

Volume

Vol6, No.4

Page

287-293

ENG

10.4236/wjcmp.2016.64027

ENG

2016

ENG