Deposition of Luminescent a-SiNx:H Films with SiH4 - N2 Gas Mixture by VHF-PECVD Using Novel Impedance Matching Method

ENG

S. Kobayashi_ N. Ohrui_ Y.C. Chao_ T. Aoki_ H. Kobayashi and T. Asakawa.

2007-07

J. Material Science: Materials in Electronics

0

pp.29-32

2007