学術論文
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Deposition of Luminescent a-SiNx:H Films with SiH4 - N2 Gas Mixture by VHF-PECVD Using Novel Impedance Matching Method
学術論文
S. Kobayashi_ N. Ohrui_ Y.C. Chao_ T. Aoki_ H. Kobayashi and T. Asakawa.
2007/07
J. Material Science: Materials in Electronics
0
pp.29-32
2007
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