学術論文
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Multilayer Mirrors for Focusing Objective in 40-nm Wavelength Region
学術論文
M. Toyoda, Y. Tamaru, S. Mori, K. Sawada, Y. Fu, E. J. Takahashi, A. Suda, F. Kannari, K. Midorikawa, M. Yanagihara
Springer Proceedings in Physics
202
287-290
ISBN 978-3-319-73025-7
2018
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