学術論文
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High throughput EUV Microscope TXM3 for single shot imaging
ワンショット観察を可能にする高スループットEUV顕微鏡の開発
学会発表要旨
T. Ejima, H. Murata, Y. Nakamura, M. Toyoda, T. Harada, M. Furudate, A. Arai, E. Sasaki, S. Yanagida, T. Tsuru, T. Hatano, M. Yanagihara, M. Yamamoto
2008/02
The 9th International Conference on the Physics of X-Ray Multilayer Structures (Montana, USA)
2007
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