学術論文
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Development of Wide Field of View EUV Microscope Using Normal Incident Multilayer Optics with LPP Light Source
LPP光源と直入射型光学系による広視野EUV顕微鏡の開発
学会発表要旨
F. Ishida, T. Ejima, M. Toyoda, T. Tsuru, T. Hatano, M. Yanagihara, H. Mizutani
2010/08
he 10th international conference on x-ray microscopy (Chicago, USA)
2010
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