An optical emission spectroscopic study of deep oscillation magnetron sputtering of titanium

ENG

Eisuke Yokoyama, Masaomi　Sanekata, Nobuo Nishimiya, Masahide Tona, Hiroaki Yamamoto, Keizo Tsukamoto, Kiyokazu Fuke, Keijiro Ohshimo, and Fuminori Misaizu

2022-10-03

ICRP-11 / GEC2022

Proceedings of ICRP-11/GEC 2022 (11th International Conference on Reactive Plasmas / 2022 Gaseous Electronics Conference)

1-2 (HW6.00076)

2022