学術論文
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An optical emission spectroscopic study of deep oscillation magnetron sputtering of titanium
国際会議プロシーディング
Eisuke Yokoyama, Masaomi Sanekata, Nobuo Nishimiya, Masahide Tona, Hiroaki Yamamoto, Keizo Tsukamoto, Kiyokazu Fuke, Keijiro Ohshimo, and Fuminori Misaizu
2022/10/03
ICRP-11 / GEC2022
Proceedings of ICRP-11/GEC 2022 (11th International Conference on Reactive Plasmas / 2022 Gaseous Electronics Conference)
1-2 (HW6.00076)
2022
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