Time-of-flight mass spectrometry diagnostics in deep oscillation magnetron sputtering (DOMS) of titanium

ENG

M. Sanekata*, Y. Nakagomi, M. Hirayama, H. Nishida, N. Nishimiya, M. Tona, H. Yamamoto, K. Tsukamoto, K. Fuke, K. Ohshimo, K. Koyasu, and F. Misaizu

2022-06

Journal of Applied Physics, American Institute of Physics (AIP)

Vol. 131, No. 24

243301 (7 pages)

10.1063/5.0089592

2022