Development of a Plasma Diagnostic Method for High Power Pulsed Magnetron Sputtering Using a Reflectron-Type Time-of-Flight Mass Spectrometer

ENG

實方真臣、塚本恵三、美齊津文典

2022-03

日本質量分析学会誌（Journal of the Mass Spectrometry Society of Japan）

第70巻第1号

pp. 30-35

DOI:10.5702/massspec.S22-06 / Online ISSN : 1880-4225, Print ISSN : 1340-8097

2021