学術論文

基本情報

氏名 實方真臣
氏名(カナ) サネカタ マサオミ
氏名(英語) SANEKATA Masaomi

題名

Dependence of Optical Emission Spectra on Argon Gas Pressure during Modulated Pulsed Power Magnetron Sputtering (MPPMS)

概要

Modulated pulsed power magnetron sputtering (MPPMS) of titanium was investigated as a function of argon gas pressure using optical emission spectroscopy (OES). Delays in discharge and the formation of comb-like discharge current waveforms due to splitting and pulsing were observed with a decrease in pressure. This observation corresponds to the evolution from MPPMS condition to deep-oscillation-magnetron-sputtering (DOMS)-like condition by changing discharge gas pressure. The optical emission intensities of the ionic species (Ar+ and Ti+) increased as the comb-like current waveforms were formed with decreasing Ar pressure. This behavior showed a marked contrast to that of the neutral species (Ar and Ti). The Ar pressure dependence of OES was revealed to be due to the plasma build-up stage, which is the initial generation process of plasma discharge in pulsed dc magnetron sputtering, from the temporal profile for the atomic-line intensities of the optically emitting species in MPPMS and DOMS-like plasmas.

種別

学術論文

共著者名

Masaomi Sanekata*, Hiroshi Nishida, Yuki Nakagomi, Yoshihiro Hirai, Nobuo Nishimiya, Masahide Tona, Naoyuki Hirata, Hiroaki Yamamoto, Keizo Tsukamoto, Keijiro Ohshimo, Fuminori Misaizu, and Kiyokazu Fuke

発行又は発表の年月

2021/05

発行所

Plasma

巻・号

Vol. 4, No. 2

掲載ページ

pp. 269-280

DOI*/ISBN*

10.3390/plasma4020018

年度

2021

備考