Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high power pulsed magnetron sputtering

ENG

Keizo Tsukamoto、 Tetsuro Tamura、Hiromi Matsusaki、Masahide Tona、 Hiroaki Yamamoto、 Yoshihiro Hirai、 Hiroshi Nishida、Yuki Nakagomi、 Nobuo Nishimiya、 Masaomi Sanekata、 Keijiro Ohshimo、 Kiichrou Koyasu, and Fuminori Misaizu

2019-07-16

XXXIV ICPIG and ICRP-10

Proceedings of The Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10)

1-2

2019