Delayed discharge characteristics in modulated pulsed power magnetron sputtering of titanium

ENG

Hiroshi Nishida、Yoshihiro Hirai、Yuki Nakagomi、Nobuo Nishimiya、Masaomi Sanekata、 Hiroaki Yamamoto、Masahide Tona、Keizo Tsukamoto、Keijiro Ohshimo、and Fuminori Misaizu

2019-06-13

ISSP2019

Proceedings of The 15th International Symposium on Sputtering & Plasma Processes (ISSP2019)

113-116

ISSN:0917-2440

2019