学術論文
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Delayed discharge characteristics in modulated pulsed power magnetron sputtering of titanium
国際会議プロシーディング
Hiroshi Nishida、Yoshihiro Hirai、Yuki Nakagomi、Nobuo Nishimiya、Masaomi Sanekata、 Hiroaki Yamamoto、Masahide Tona、Keizo Tsukamoto、Keijiro Ohshimo、and Fuminori Misaizu
2019/06/13
ISSP2019
Proceedings of The 15th International Symposium on Sputtering & Plasma Processes (ISSP2019)
113-116
ISSN:0917-2440
2019
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