Academic Theses

Basic information

Name SANEKATA Masaomi

Title

Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)

Summary 

Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current wavefor

ENG

ENG

ENG

Masaomi Sanekata*, Hiroshi Nishida, Tatsuya Watabe, Yuki Nakagomi, Yoshihiro Hirai, Nobuo Nishimiya, Masahide Tona, Hiroaki Yamamoto, Naoyuki Hirata, Keizo Tsukamoto, Keijiro Ohshimo, Fuminori Misaizu, and Kiyokazu Fuke

Date of Issue

2021-04-21

Magazine(name)

Plasma

Volume

Vol. 4, No. 2

Page

pp. 239-251

ENG

10.3390/plasma4020016

ENG

2021

ENG