学術論文
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Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)
Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current wavefor
学術論文
Masaomi Sanekata*, Hiroshi Nishida, Tatsuya Watabe, Yuki Nakagomi, Yoshihiro Hirai, Nobuo Nishimiya, Masahide Tona, Hiroaki Yamamoto, Naoyuki Hirata, Keizo Tsukamoto, Keijiro Ohshimo, Fuminori Misaizu, and Kiyokazu Fuke
2021/04/21
Plasma
Vol. 4, No. 2
pp. 239-251
10.3390/plasma4020016
2021
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