2007-07

ENG

Study of low power deposition of ITO for top emission OLED with facing target and RF sputtering systems

17TH INTERNATIONAL VACUUM CONGRESS (IVC-17)、13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE、 (ICSS-13)AND NTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY (ICN+T 2007)

S Dangtip、 Y Hoshi、 Y Kasahara、 Y Onai、 T Osotchan、 Y Sawada and T Uchida

Stockholm、 Sweden

2007