Other
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2009-04
ENG
A study of deposition of ITO films on organic layer using facing target sputtering in Ar and Kr gases
6th International Symposium on Transparent Oxide Thin Films fo Electronics and Optics (TOEO-6) 16p-P103、 Tokyo Fashion Town (TFT) Building、 Ariake
Hao Lei、 Keisuke Ichikawa、 Yoichi Hoshi、 Meihan Wang、 Takayuki Uchida、 Yutaka Sawada
Tokyo
2009
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