2008-12

ENG

Effect of Water Vapor in the Sputtering Chamber on the Thermal Crystallization of Amorphous Indium-Tin-Oxide Thin Film

Interantional Union of Materials Research Society (IUMRS)-International Conference in Asia (ICA) 2008、 Nagoya Congress Center (Oral、 PROGRAM BOOK、 pp. 95)

Meihan Wang、 Yutaka Sawada、 Hao Lei、 Takeshi Kondo、 Yoshiyuki Seki、 Youichi Hoshi、 Takayuki Uchida、 Takayuki Konya、 Akira Kishi、 Kazuko Mtomura、 Tadashi Arii、 Lixian Sun

名古屋

2008