Effect of Water Vapor in the Sputtering Chamber on the Thermal Crystallization of Amorphous Indium-Tin-Oxide Thin Film
概要
 
リンク_URL
発表場所(学会名、会場名等)
Interantional Union of Materials Research Society (IUMRS)-International Conference in Asia (ICA) 2008、 Nagoya Congress Center (Oral、 PROGRAM BOOK、 pp. 95)