Reactive sputter deposition of WO3 films by using two deposition methods

ENG

Yoji Yasuda, Yoichi Hoshi, Shin-ichi Kobayashi, Takayuki Uchida, Yutaka Sawada, Meihan Wang, and Hao Lei

2019-05

Journal of Vacuum Science & Technology

A 37, 031514

(031514) 1-6

https://doi.org/10.1116/1.5092863

2019