Effect of negative bias on the composition and structure of the tungsten oxide thin films deposited by magnetron sputtering

ENG

Meihan Wang_ Hao Lei_ Jiaxing Wen_ Haibo Long_ Yutaka Sawada_ Yoichi Hoshi_ Takayuki Uchida_ Zhaoxia Hou

2015-12

Applied Surface Science

0

521-525

2015