Academic Theses
Title
Summary
ENG
ENG
ENG
Date of Issue
Magazine(name)
Volume
Page
ENG
ENG
ENG
Basic information
Name
UCHIDA Takayuki
Title
有機EL素子用低ダメージスパッタ成膜法
Summary
ENG
ENG
ENG
ENG
星陽一_ 雷浩_ 小林信一_ 内田孝幸
Date of Issue
2009-07
Magazine(name)
Sputtering &Plasma Processes _ 2009.pp.1-10_
Volume
No.3
Page
pp.1-10
ENG
ENG
2009
ENG
