A study of deposition of ITO films on organic layer using facing target sputtering in Ar and Kr gases

ENG

Hao Lei_ Keisuke Ichikawa_ Yoichi Hoshi_ Meihan Wang_ Takayuki Uchida_ Yutaka Sawada

2010-03

6th International Symposium on Transparent Oxide Thin Films fo Electronics and Optics (TOEO-6) 16p-P103_ Tokyo Fashion Town (TFT) Building_ Ariake; Proceedings [CD-ROM version]

0

A278

2009