Academic Theses

Basic information

Name UCHIDA Takayuki

Title

A study of deposition of ITO films on organic layer using facing target sputtering in Ar and Kr gases

Summary

 

ENG

ENG

ENG

Hao Lei_ Keisuke Ichikawa_ Yoichi Hoshi_ Meihan Wang_ Takayuki Uchida_ Yutaka Sawada

Date of Issue

2010-03

Magazine(name)

Thin Solid Films

Volume

11

Page

2926-2929

ENG

 

ENG

2009

ENG