Thermal crystallization kinetics and crystallite size distribution of amorphous ITO film deposited in the presence or absence of water vapor

ENG

Meihan Wang_ Yutaka Sawada_　Hao Lei_ Yoshiyuki Seki_ Yoichi Hoshi_ Takayuki Uchida_ Takayuki Konya and Akira Kishi

2010-03

Thin Solid Films

11

2992-2995

2009