Thermal change of amorphous indium tin oxide films sputter-deposited in water vapor atmosphere

ENG

Takayuki Uchida_ Somsorn Singkarat_ Teerasak Kamwanna_ Somsak Dangtip_ Suparerk Aukkaravittayapun_ Toshikazu Nishide_Satoko Tokiwa and Yutaka Sawada_

2007-05

5th International Symposium on Transparent Oxide Thin Films for Electronics and Optics _ (2007.5)

国際会議プロシーディング

p.48

2007