Thermal change of amorphous indium tin oxide films sputter-deposited in water vapor atmosphere

国際会議プロシーディング

Takayuki Uchida_ Somsorn Singkarat_ Teerasak Kamwanna_ Somsak Dangtip_ Suparerk Aukkaravittayapun_ Toshikazu Nishide_Satoko Tokiwa and Yutaka Sawada_

2007/05

5th International Symposium on Transparent Oxide Thin Films for Electronics and Optics _ (2007.5)

国際会議プロシーディング

p.48

2007