Academic Theses

Basic information

Name UCHIDA Takayuki

Title

Step coverage study of indium-tin-oxide thin films by spray CVD on non-flat substrates at different temperatures

Summary

 

ENG

ENG

ENG

T. Kondo_ Y. Sawada_ K. Akiyama_ H. Funakubo_ T. Kiguchi_ S. Seki_ M.H. Wang and T. Uchida

Date of Issue

 

Magazine(name)

Thin Solid Films

Volume

516

Page

5864-5867

ENG

 

ENG

2008

ENG