学術論文
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Step coverage study of indium-tin-oxide thin films by spray CVD on non-flat substrates at different temperatures
学術論文
T. Kondo_ Y. Sawada_ K. Akiyama_ H. Funakubo_ T. Kiguchi_ S. Seki_ M.H. Wang and T. Uchida
Thin Solid Films
516
5864-5867
2008
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