Academic Theses

Basic information

Name SONE Junji

Title

Fundamental Study for a Graphite-Based Microelectromechanical System

Summary

We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by co

ENG

ENG

ENG

Junji Sone, Mutsuaki Murakami, Atsushi Tatami

Date of Issue

2018-02

Magazine(name)

micromachines (MDPI)

Volume

9(2)

Page

1-16

ENG

doi:10.3390/mi9020064

ENG

2017

ENG