学術論文
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Fundamental Study for a Graphite-Based Microelectromechanical System
We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by co
学術論文
Junji Sone, Mutsuaki Murakami, Atsushi Tatami
2018/02
micromachines (MDPI)
9(2)
1-16
doi:10.3390/mi9020064
2017
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