Academic Theses

Basic information

Name SATOH Toshifumi

Title

Relationship between electrical and ionic properties of sputtered CNx Film

Summary

 

ENG

ENG

ENG

T. SATOH_ H. Tango_ G. SAGO_ S. KOHIKI_ K. GOTO and Y. ICHIKAWA

Date of Issue

2005-12

Magazine(name)

Thirteenth International Workshop on The Physics of Semiconductor Devices

Volume

0

Page

pp. 1464-1466

ENG

 

ENG

2005

ENG