Academic Theses
Title
Summary
ENG
ENG
ENG
Date of Issue
Magazine(name)
Volume
Page
ENG
ENG
ENG
Basic information
Name
SATOH Toshifumi
Title
Relationship between electrical and ionic properties of sputtered CNx Film
Summary
 
ENG
ENG
ENG
ENG
T. SATOH_ H. Tango_ G. SAGO_ S. KOHIKI_ K. GOTO and Y. ICHIKAWA
Date of Issue
2005-12
Magazine(name)
Thirteenth International Workshop on The Physics of Semiconductor Devices
Volume
0
Page
pp. 1464-1466
ENG
 
ENG
2005
ENG