学術論文
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Relationship between electrical and ionic properties of sputtered CNx Film
国際会議プロシーディング
T. SATOH_ H. Tango_ G. SAGO_ S. KOHIKI_ K. GOTO and Y. ICHIKAWA
2005/12
Thirteenth International Workshop on The Physics of Semiconductor Devices
0
pp. 1464-1466
2005
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