学術論文
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Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high power pulsed magnetron sputtering of titanium
学術論文
Keizo Tsukamoto, Tetsuro Tamura, Hiromi Matsusaki, Masahide Tona, Hiroaki Yamamoto, Yuki Nakagomi, Hiroshi Nishida, Yoshihiro Hirai, Nobuo Nishimiya, Masaomi Sanekata*, Keijiro Ohshimo, Kiichirou Koyasu, and Fuminori Misaizu*
2020/03
Japanese Journal of Applied Physics
Vol. 59
SHHB05 (6 pages)
10.35848/1347-4065/ab71de
2019
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