作品・発表
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2017/10/17
学会発表（海外・国際学会）
Initial oxidation characteristics of air-exposed silicon nitride films grown at low substrate temperature using very-high-frequency plasma-enhanced chemical vapor deposition
TACT2017, The 5th International Thin Films Conference, 東華大学
台湾
Taiwan Association for Coating and Thin Film Technology (TACT)
2017
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