2013/02

学会発表（海外・国際学会）

Structural information from IR spectroscopy on a-SiNx:H deposited from SiH4 - N2 gas mixture using VHF-PECVD

6th International WorkShop on New Group IV Semiconductor Nanoelectronics、 (Research Institute of Electrical Communication、 Tohoku University)

S. Kobayashi

2012