学術論文
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Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high power pulsed magnetron sputtering of titanium
A photoionization method using a vacuum ultraviolet laser was applied to the time-of-flight mass spectrometry of ions formed in high-power pulsed magnetron sputtering (HPPMS). This method is a new plasma diagnostic technique for measuring simultaneously t
学術論文
Keizo Tsukamoto, Tetsuro Tamura, Hiromi Matsusaki, Masahide Tona, Hiroaki Yamamoto, Yuki Nakagomi, Hiroshi Nishida, Yoshihiro Hirai, Nobuo Nishimiya, Masaomi Sanekata, Keijiro Ohshimo, Kiichirou Koyasu, Fuminori Misaizu
2020/03
Japanese Journal of Applied Physics
Vol. 59, No. SH
10.35848/1347-4065/ab71de
2019
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