Other
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2022-10-05
2022-10-05
ENG
An optical emission spectroscopic study of deep oscillation magnetron sputtering of titanium
11th International Conference on Reactive Plasmas / 2022 Gaseous Electronics Conference（ICRP-11 / GEC2022）
Eisuke Yokoyama, Masaomi Sanekata, Nobuo Nishimiya, Masahide Tona, Hiroaki Yamamoto, Keizo Tsukamoto, Kiyokazu Fuke, Keijiro Ohshimo, and Fuminori Misaizu
仙台
ICRP-11 / GEC2022
2022
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