Other
|
|
2019-07-16
2019-07-16
ENG
Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high power pulsed magnetron sputtering
The Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10)（札幌市教育文化会館）
Keizo Tsukamoto、 Tetsuro Tamura、Hiromi Matsusaki、Masahide Tona、 Hiroaki Yamamoto、 Yoshihiro Hirai、 Hiroshi Nishida、Yuki Nakagomi、 Nobuo Nishimiya、 Masaomi Sanekata、 Keijiro Ohshimo、 Kiichrou Koyasu, and Fuminori Misaizu
札幌
XXXIV ICPIG and ICRP-10
2019
|
