Academic Theses

Basic information

Name SANEKATA Masaomi

Title

Dependence of Optical Emission Spectra on Argon Gas Pressure during Modulated Pulsed Power Magnetron Sputtering (MPPMS)

Summary

Modulated pulsed power magnetron sputtering (MPPMS) of titanium was investigated as a function of argon gas pressure using optical emission spectroscopy (OES). Delays in discharge and the formation of comb-like discharge current waveforms due to splitting

ENG

ENG

ENG

Masaomi Sanekata*, Hiroshi Nishida, Yuki Nakagomi, Yoshihiro Hirai, Nobuo Nishimiya, Masahide Tona, Naoyuki Hirata, Hiroaki Yamamoto, Keizo Tsukamoto, Keijiro Ohshimo, Fuminori Misaizu, and Kiyokazu Fuke

Date of Issue

2021-05

Magazine(name)

Plasma

Volume

Vol. 4, No. 2

Page

pp. 269-280

ENG

10.3390/plasma4020018

ENG

2021

ENG