2007-05

ENG

Thermal change of amorphous indium tin oxide films sputter-deposited in water vapor atmosphere

5th International Symposium on Transparent Oxide Thin Films for Electronics and Optics 、 (2007.5)

Takayuki Uchida、 Somsorn Singkarat、 Teerasak Kamwanna、 Somsak Dangtip、 Suparerk Aukkaravittayapun、 Toshikazu Nishide、Satoko Tokiwa and Yutaka Sawada、

葉山

2007