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Fabrication of Zirconia Thin Film by Spray CVD: Influence of Substrate Temperature and Al Composition of the Films
8th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics (TOEO8)May 13-15、 2013
Shigeyuki Seki、 Takumi Yamaga、 Takahiro Suzuki、 Ryou Onodera、 Naoki Yoshida、 Keunyoung Pak、 Yoshiyuki Seki、 Takayuki Uchida、 Yoichi Hoshi、 Yutaka Sawada、 Kunio Yubuta、 and Toetsu Shishido
International Conference Center、 Waseda University
The 166th Committee on Photonic & Electronic Oxide、 Japan Society for the Promotion of Science (JSPS)
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