2009-04

ENG

Thermal crystallization kinetics and crystallite size distribution of amorphous ITO film deposited in the presence or absence of water vapor

6th International Symposium on Transparent Oxide Thin Films fo Electronics and Optics (TOEO-6) 15p-P053、 Tokyo Fashion Town (TFT) Building、 Ariake

Meihan Wang、 Yutaka Sawada、 Hao Lei、 Yoshiyuki Seki、 Yoichi Hoshi、 Takayuki Uchida、 Takayuki Konya、 Akira Kishi

Tokyo

2009